化学机械抛光 (CMP) 技术促成器件图案形成和微缩,也是晶圆良率的关键决定因素。此技术更普遍运用在新型芯片架构的制造,这些架构通常需要新型材料和多道CMP制程。它的原理很简单:去除多余的材料,并确保洁净、平坦的晶圆表面,以进行下一道制程工艺。然而,随着CMP工序的发展,减少缺陷成为一项日益严峻的挑战。


Entegris对CMP工艺具备独特、全方位的理解。当CMP不同的核心材料良好运作并带来协同效应时,污染会减少,晶圆厂才能最好地实现CMP良率目标。从Entegris采购研磨液、组件、过滤器、化学品、研磨垫修整器、清洁刷和监测工具,在晶圆加工中可获得最佳性能、降低拥有成本并确保高良率。

一站式备齐CMP解决方案,提升晶圆良率,并减少差异性


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一站式备齐CMP解决方案,提升晶圆良率,并减少差异性

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一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性

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一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性

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一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
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]-o_q-_-x

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一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性


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一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性
一站式备齐CMP解决方案,提升晶圆良率,并减少差异性

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]-o_q-_-x


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一站式备齐CMP解决方案,提升晶圆良率,并减少差异性


原文始发于微信公众号(Entegris应特格微电子):一站式备齐CMP解决方案,提升晶圆良率,并减少差异性

作者 gan, lanjie