玻璃基板可以比晶圆更大,尺寸为 600 x 600 毫米。由于其方形形状,甚至可以有效地利用板的角落。挑战在于控制玻璃基板的翘曲,保持布线材料和光刻胶材料的厚度均匀,并形成高密度的电路。为了解决这些问题,该公司开发了可高精度控制液晶面板厚度的涂层技术,以及为液晶面板开发的处理大型玻璃基板的技术,实现了在顶部形成高密度再分布层。
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原文始发于微信公众号(艾邦半导体网):东丽工程开发玻璃基板设备,实现 2.5/3D 封装